| Brand New Refurbish Installation Modify Parts sale Repair Overhaul |
SPUTTERING SYSTEM
| Cluster/In-line Sputtering System | |
| Al, Ti, Cu, Sus, Mo, ITO, SiO2, TiO2, SiN, CrOx, ZnO, AZO | |
| Thickness Uniformity : < ±5 | |
| Uniformity of RTR : < ±3% | |
| Heat uniformity : <± 3% | |
| Power Supply : DC, Pulsed DC, RF | |
| EtherCAT Control |
List
- PREVIOUSLPCVD, AP ANNEAL LARGE BATCH
- NEXTIGS Block
본문
Detail view
예제 제품 5