| Brand New Refurbish Installation Modify Parts sale Repair Overhaul |
LPCVD, AP ANNEAL LARGE BATCH
| TEOS, POLY, SIN, OXIDATION, ANNEAL, PIQ | |
| MAX 23 BUFFER | |
| MAX 175 BATCH WAFER | |
| HIGH SPEED CONTROL SYSTEM(EtherCAT) | |
| NEXT GENERATION GROUP CONTROL | |
| LOW, MID, HIGH TEMP HEATER | |
| BATCH ALD-SIN |
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