AGS (Advanced Group SyStem) - System Overview
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Equipment Model Star Group set up a process to Log / Alarm checking and Data can be analyzed and ,
Process Recipe editing and processing conditions can be checked and loaded condition .
① Process Log Viewer Screen ② Data Analysis ③ Recipe Editor Screen ④ Alarm Log Viewer Screen ⑤ Buffer Status Screen ⑥ Load Port Status Screen
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AGS-Overview-v11.pdf (3.1M)
35 Times Download | DATE : 2021-06-15 11:19:43