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CUBIT Co., Ltd.
  • Business Areas
  • Valve Overhaul
  • Business Areas

    Vacuum Pressure Controller functional verification, real-time monitoring and alarm system

    Valve Overhaul

    Vacuum Pressure Controller functional verification, real-time monitoring and alarm system

    Valve Vacuum Test System - [High-speed VEC test infra from the perspective of ALD - Industry First]

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    ① Chamber    ② Baratron Gauge    ③ CKD Valve   ④ Monitor   ⑤ Pump 


    You can verify the functionality of the Vacuum Pressure Controller by configuring a high-speed Vec Test infra.

    It can also receive Pressure Data for real-time monitoring, and build a notification system in the event of an anomaly.



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    High-speed Open/Close tests, such as the actual ALD process, can be conducted for more than an hour in harsh environments to eliminate problems
    when applying the actual process.

    [ Industry First ]