① Chamber    ② Baratron Gauge    ③ CKD Valve   ④ Monitor   ⑤ Pump 

You can verify the functionality of the Vacuum Pressure Controller by configuring a high-speed Vec Test infra.

It can also receive Pressure Data for real-time monitoring, and build a notification system in the event of an anomaly.

High-speed Open/Close tests, such as the actual ALD process, can be conducted for more than an hour in harsh environments to eliminate problems
when applying the actual process.

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