① Chamber ② Baratron Gauge ③ CKD Valve ④ Monitor ⑤ Pump
You can verify the functionality of the Vacuum Pressure Controller by configuring a high-speed Vec Test infra.
It can also receive Pressure Data for real-time monitoring, and build a notification system in the event of an anomaly.
High-speed Open/Close tests, such as the actual ALD process, can be conducted for more than an hour in harsh environments to eliminate problems
when applying the actual process.
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