Developed and applied to prevent a large number of scratches and damage caused by loading 100~200 Wafers in the wrong arrangement on the Furnace equipment.

AGS (Advanced Group System) is a solution that integrates monitoring and management of multiple equipment within [Fab] in one system.

Real-time status management system for each equipment - Provides process, event and alarm, recipe information storage, editing and remote management Centralized management of each device is possible.

Main functions: real-time monitoring of all or individual equipment status, data/alarm history management, RMS, SPC, APC functions

M-Box is a customizable solution that can collect and report data (EAP, FDC, RMS, etc.) or control data from equipment or devices according to the customer's needs in order to improve the product quality and productivity.

It is a system that delivers data (DAQ) generated and collected by the equipment to upper EAP Hosts including non-SECS communication. It is possible to provide DAQ to multiple hosts (FDC, SPC, RMS, CMS).