LAPCVD 200mm Tools
Equipment used to form an insulating oxide film by forming a diffusion film in a semiconductor process. Long-time high-temperature heat treatment equipment such as LAPCVD
LAPCVD 300mm Tools
Equipment used to form an insulating oxide film by forming a diffusion film in a semiconductor process. Long-time high-temperature heat treatment equipment such as LAPCVD
Valve Overhaul
[High-speed VEC test infra. from the perspective of ALD]- Industry First -
It is possible to verify the function of the Vacuum Pressure Controller by configuring the high-speed Vec test infra.
Parts Sale
We have localized and applied various parts such as Teflon valve parts and gas splitter parts, and are selling and supplying them to semiconductor companies